Measurement Features

FilmTek™

2000SE / 3000SE

Index of Refraction折射率
(at 2µm thickness)

±0.0002

Thickness Measurement Range

膜厚范圍

1Å-200µm

Maximum Spectral Range (nm)

大光譜范圍

190-1700

Standard Spectral Range (nm)

標準光譜范圍

240-1000

Reflection

反射

Yes

Transmission

透射

Yes (3000)

Spectroscopic Ellipsometry

光譜橢圓分析法

Yes

Power Spectral Density

Yes

Multi-angle Measurements (DPSD)

Yes

TE & TM Components of Index

 No

Multi-layer thickness

Yes

Index of Refraction

Yes

Extinction (absorption) Coefficient

Yes

Energy band gap

Yes

Composition

Yes

Crystallinity

Yes

Inhomogeneous Layers

Yes

Surface Roughness

Yes