Measurement Features

FilmTek™

4000 / 4500

Index of Refraction折射率
(at 2µm thickness)

±0.00002

Thickness Measurement Range

膜厚范圍

3nm-350µm

Maximum Spectral Range (nm)

大光譜范圍

190-1700nm

Standard Spectral Range (nm)

標準光譜范圍

380-1000nm

Reflection

反射

Yes

Transmission

透射

 Yes(4500)

Spectroscopic Ellipsometry

橢圓光譜技術

No 

Power Spectra Density

功率譜密度

Yes

Multi-angle Measurements

多角度測量(DPSD)

Yes

TE & TM Components of Index

TE和TM成分指數

Yes

Multi-layer thickness

多層厚度

Yes

Index of Refraction

折射率

Yes

Extinction (absorption) Coefficient

消光(吸收)系數

Yes

Energy band gap

能帶隙

Yes

Composition

組成

Yes

Crystallinity

結晶度

Yes

Inhomogeneous Layers

非均勻層

Yes

Surface Roughness

表面粗糙度

Yes